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sp;   据报道,三星电子已为平泽半导体生产基地P5晶圆厂集群的首个阶段PH1订购了70余台光刻机,为该阶段2027年的投运做好准备。平泽P5 PH1所需的这些光刻机来自ASML和佳能,其中约20台为ASML的EUV曝光系统。P5 PH1将用于1c nm制程DRAM生产,将同时制造通用内存和HBM。(财联社)原文链接

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